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設計技術シリーズ

赤外線センサ原理と技術

著者: 木股 雅章氏(立命館大学)
価格: 4,600円(本体)+税
判型: A5
ページ数: 228 ページ
ISBN: 978-4-904774-64-9
発売日: 2018/6/26

【著者紹介】

【目次】

第1章 はじめに

第2章 赤外線検出器の分類と非冷却IRFPA開発の推移

  1. 2-1 赤外線検出器の分類
  2. 2-2 非冷却IRFPA開発の推移

第3章 非冷却IRFPAの基礎

  1. 3-1 熱型赤外線検出器の動作
  2. 3-2 非冷却IRFPAの構成と動作
  3. 3-3 赤外線イメージング
  4. 3-4 IRFPAの性能指標
  5. 3-5 非冷却IRFPAの設計
    1. 3-5-1 感度決定要因
    2. 3-5-2 温度センサ
    3. 3-5-3 熱設計
    4. 3-5-4 赤外線吸収
  6. 3-6 理論限界
    1. 3-6-1 画素ピッチ
    2. 3-6-2 NETD

第4章 強誘電体IRFPA

  1. 4-1 強誘電体赤外線検出器の動作
  2. 4-2 ハイブリッド強誘電体IRFPA
  3. 4-3 薄膜強誘電体モノリシックIRFPA

第5章 抵抗ボロメータIRFPA

  1. 5-1 抵抗ボロメータ赤外線検出器の動作
  2. 5-2 VOxマイクロボロメータIRFPA
  3. 5-3 その他の材料を用いた抵抗ボロメータIRFPA
  4. 5-4 抵抗ボロメータIRFPAの画素ピッチ縮小と高解像度化
  5. 5-5 中赤外線領域に感度を持った非冷却IRFPA

第6章 熱電IRFPA

  1. 6-1 熱電赤外線検出器の動作
  2. 6-2 サーモパイルIRFPA

第7章 ダイオードIRFPA

  1. 7-1 ダイオード赤外線検出器の動作
  2. 7-2 SiダイオードIRFPA

第8章 バイマテリアルとサーモオプティカルIRFPA

第9章 非冷却IRFPAの真空パッケージング技術

  1. 9-1 真空パッケージングの必要性
  2. 9-2 初期の真空パッケージング技術
  3. 9-3 低コスト化への取り組み
    1. 9-3-1 ウエハレベル真空パッケージング
    2. 9-3-2 チップレベル真空パッケージング
    3. 9-3-3 バッチ処理真空パッケージング
    4. 9-3-4 ピクセルレベル真空パッケージング
  4. 9-4 マイクロ真空計

第10章 非冷却赤外線カメラと応用

  1. 10-1 非冷却赤外線カメラの構成と特徴
    1. 10-1-1 全体構成
    2. 10-1-2 光学系
    3. 10-1-3 補正
    4. 10-1-4 温度校正
  2. 10-2 暗視応用
  3. 10-3 温度計測応用
  4. 10-4 その他の応用

第11章 むすび

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